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Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge

Abstract : This paper is devoted to the validation of Langmuir probe technique by microwave autointerferometry in a surface wave discharge at medium pressure (from 0.1 up to 10 Torr). Temperatures of neutrals, obtained from Rayleigh scattering, and electrons, given by double probe measurements, have been used to estimate the mean free path and the sheath length. Hence, the number of collisions in the sheath has been obtained. We have verified that two different phenomena occur in the sheath, while the pressure increases. These phenomena are depicted, in literature, as two different coefficients used to modify the value of the noncollisional current of Laframboise. Coefficients given by various authors have been investigated with accuracy knowing the number of collisions in the sheath. Very good agreements are obtained between Zakrzewski and Kopiczynski theory and autointerferometry measurements which are unaffected by collisional phenomena.
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http://hal.in2p3.fr/in2p3-00372705
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Submitted on : Thursday, April 2, 2009 - 9:46:33 AM
Last modification on : Thursday, November 19, 2020 - 12:58:51 PM

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Antoine Rousseau, E. Teboul, S. Béchu. Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge. Journal of Applied Physics, American Institute of Physics, 2005, 98, pp.083306. ⟨10.1063/1.2112172⟩. ⟨in2p3-00372705⟩

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