J. Pelletier, A. Anders. Plasma-blased ion implantation and deposition: A review of physics, technology, and applications.
IEEE Transactions on Plasma Science, Institute of Electrical and Electronics Engineers, 2005, 33, pp.1944-1959.
⟨10.1109/TPS.2005.860079⟩.
⟨in2p3-00394474⟩