Structural and magnetic properties of Ni3N synthesized by multidipolar microwave plasma-assisted reactive sputtering

David Vempaire; Salvatore Miraglia; J. Pelletier; Daniel Fruchart; El-Kebir Hlil; Luc Ortega; André Sulpice; Farid Fettar

doi:10.1016/j.jallcom.2009.02.066

Structural and magnetic properties of Ni3N synthesized by multidipolar microwave plasma-assisted reactive sputtering

David Vempaire ¹ Salvatore Miraglia ² J. Pelletier ³ Daniel Fruchart ² El-Kebir Hlil ¹ Luc Ortega ⁴ André Sulpice ⁵ Farid Fettar ⁶

1 NEEL - Institut Néel

2 IICE SPMCE

NEEL - Institut Néel

3 LPSC - Laboratoire de Physique Subatomique et de Cosmologie

4 INSTRU

NEEL - Institut Néel

5 Supra MagSup

NEEL - Institut Néel

6 SIN

NEEL - Institut Néel

Document type :

Journal articles

Journal of Alloys and Compounds, Elsevier, 2009, 480, pp.225-229. <10.1016/j.jallcom.2009.02.066>

Domain :

Physics / Physics / Plasma Physics

Engineering Sciences / Plasmas

http://hal.in2p3.fr/in2p3-00394503
Contributor : Emmanuelle Vernay <>
Submitted on : Thursday, June 11, 2009 - 8:21:10 PM
Last modification on : Wednesday, January 14, 2015 - 9:55:17 AM

Structural and magnetic properties of Ni3N synthesized by multidipolar microwave plasma-assisted reactive sputtering

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