Skip to Main content Skip to Navigation
Conference papers

Advances and drawbacks of microwave plasmas for surface processing

Complete list of metadata

http://hal.in2p3.fr/in2p3-00399341
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, June 26, 2009 - 10:59:36 AM
Last modification on : Thursday, March 11, 2021 - 10:36:02 AM

Identifiers

  • HAL Id : in2p3-00399341, version 1

Collections

Citation

A. Lacoste, Jean Pelletier, M. Moisan, C. Héau, B. Schmidt. Advances and drawbacks of microwave plasmas for surface processing. 17th International Colloquium on PLASMA PROCESSES (CIP09), Jun 2009, Marseille, France. ⟨in2p3-00399341⟩

Share

Metrics

Record views

105