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Submitted on : Friday, June 26, 2009 - 10:59:36 AM Last modification on : Thursday, November 19, 2020 - 12:58:54 PM
A. Lacoste, J. Pelletier, M. Moisan, C. Héau, B. Schmidt. Advances and drawbacks of microwave plasmas for surface processing. 17th International Colloquium on PLASMA PROCESSES (CIP09), Jun 2009, Marseille, France. ⟨in2p3-00399341⟩