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Conference papers

Advances and drawbacks of microwave plasmas for surface processing

A. Lacoste 1 Jean Pelletier 1 M. Moisan C. Héau B. Schmidt
1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie
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Conference papers
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http://hal.in2p3.fr/in2p3-00399341
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, June 26, 2009 - 10:59:36 AM
Last modification on : Thursday, March 11, 2021 - 10:36:02 AM

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  • HAL Id : in2p3-00399341, version 1

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IN2P3 | CNRS | UGA | LPSC | LPSC-PLASMAS | GEPI

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A. Lacoste, Jean Pelletier, M. Moisan, C. Héau, B. Schmidt. Advances and drawbacks of microwave plasmas for surface processing. 17th International Colloquium on PLASMA PROCESSES (CIP09), Jun 2009, Marseille, France. ⟨in2p3-00399341⟩

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