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Distributed microwave plasmas with extended operating conditions: new opportunities for plasma-based ion implantation and deposition

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http://hal.in2p3.fr/in2p3-00414168
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, September 8, 2009 - 1:59:33 PM
Last modification on : Thursday, November 19, 2020 - 12:58:39 PM

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  • HAL Id : in2p3-00414168, version 1

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J. Pelletier, A. Lacoste, G. Regnard. Distributed microwave plasmas with extended operating conditions: new opportunities for plasma-based ion implantation and deposition. 10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009), 2009, São José dos Campos, Brazil. ⟨in2p3-00414168⟩

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