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Deposition of thin films of Mg2 Si1-x Snx solid solution by plasma assisted co-sputtering

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http://hal.in2p3.fr/in2p3-00530474
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 29, 2010 - 9:37:17 AM
Last modification on : Tuesday, November 24, 2020 - 4:58:04 PM

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  • HAL Id : in2p3-00530474, version 1

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H. Le-Quoc, A. Lacoste, A. Bès, S. Béchu, J. Pelletier, et al.. Deposition of thin films of Mg2 Si1-x Snx solid solution by plasma assisted co-sputtering. 8th European Conference on Thermoelectrics (ECT 2010), Sep 2010, Como, Italy. 4 p., 2010. ⟨in2p3-00530474⟩

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