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Thin films of thermoelectric compound Mg2Sn deposited by co-sputtering assisted by multi-dipolar microwave plasma

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http://hal.in2p3.fr/in2p3-00640016
Contributor : Emmanuelle Vernay <>
Submitted on : Thursday, November 10, 2011 - 2:15:02 PM
Last modification on : Friday, December 18, 2020 - 1:10:03 PM

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Huy Le-Quoc, A. Lacoste, El-Kebir Hlil, A. Bès, T. Tan Vinh, et al.. Thin films of thermoelectric compound Mg2Sn deposited by co-sputtering assisted by multi-dipolar microwave plasma. Journal of Alloys and Compounds, Elsevier, 2011, 509, pp.9906-9911. ⟨10.1016/j.jallcom.2011.07.085⟩. ⟨in2p3-00640016⟩

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