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Antenna-coupled arrays of NbSi micro-bolometers

A. Bideaud 1 B. Belier 2 Alain Benoit 1 L. Bergé 3 P. Camus 4 S. Collin 5 L. Dumoulin 5 C. Hoffmann 1 S. Marnieros 5 Alessandro Monfardini 1
3 CSNSM INSTR
CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
4 Cryo [2007-2015] - Cryogénie [2007-2015]
NEEL [2007-2015] - Institut Néel [2007-2015]
5 CSNSM PS1
CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse, CSNSM - Centre de Sciences Nucléaires et de Sciences de la Matière
Abstract : Microbolometers are at present the most sensitive detectors for mm and sub-mm Astronomy. They are in use in most of the present instruments in that bandwidth. We have developed filled arrays of NbSi-based planar antenna coupled microbolometers. The fabrication details are given, together with characterization of the NbSi thermometers and optical results. The optical performances are potentially good for ground-based mm-wave astronomy applications, while the overall detectors performances are limited by low-frequency excess noise in the thermometric NbSi high-impedance sensors (Anderson insulator).
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Submitted on : Wednesday, March 28, 2012 - 9:55:22 AM
Last modification on : Wednesday, September 16, 2020 - 5:43:39 PM

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A. Bideaud, B. Belier, Alain Benoit, L. Bergé, P. Camus, et al.. Antenna-coupled arrays of NbSi micro-bolometers. Experimental Astronomy, springer Link, 2011, 32, pp.179-191. ⟨10.1007/S10686-011-9261-2⟩. ⟨in2p3-00683061⟩

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