X-ray Scattering Study of Nanodot Pattern Formation on Semiconductor Surfaces by Low Energy Ion Beam Sputtering

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Submitted on : Monday, June 4, 2012 - 11:00:45 AM
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O. Plantevin, R. Gago, L. Vázquez, A. Biermanns. X-ray Scattering Study of Nanodot Pattern Formation on Semiconductor Surfaces by Low Energy Ion Beam Sputtering. Indo-French conference on Nano-Structuring by Ion Beams, Dec 2008, Bhubaneswar, India. Nova Science Publishers Inc., pp.129-138, 2011. <in2p3-00703736>

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