X-ray Scattering Study of Nanodot Pattern Formation on Semiconductor Surfaces by Low Energy Ion Beam Sputtering

O. Plantevin 1 R. Gago L. Vázquez A. Biermanns
1 CSNSM PS2
CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
docType_s :
Conference papers
Indo-French conference on Nano-Structuring by Ion Beams, 2009, Bhubaneswar, India. Nova Science Publishers Inc., pp.129-138


http://hal.in2p3.fr/in2p3-00703736
Contributor : Christine Hadrossek <>
Submitted on : Monday, June 4, 2012 - 11:00:45 AM
Last modification on : Monday, October 13, 2014 - 3:00:43 PM

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O. Plantevin, R. Gago, L. Vázquez, A. Biermanns. X-ray Scattering Study of Nanodot Pattern Formation on Semiconductor Surfaces by Low Energy Ion Beam Sputtering. Indo-French conference on Nano-Structuring by Ion Beams, 2009, Bhubaneswar, India. Nova Science Publishers Inc., pp.129-138. <in2p3-00703736>

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