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Coupling modes of microwave plasma sources with localized power absorption

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http://hal.in2p3.fr/in2p3-00731527
Contributor : Emmanuelle Vernay <>
Submitted on : Thursday, September 13, 2012 - 9:32:24 AM
Last modification on : Monday, July 20, 2020 - 9:18:29 AM

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  • HAL Id : in2p3-00731527, version 1

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A. Lacoste, G. Regnard, J. Pelletier. Coupling modes of microwave plasma sources with localized power absorption. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24. ⟨in2p3-00731527⟩

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