Coupling modes of microwave plasma sources with localized power absorption

A. Lacoste 1 G. Regnard 1 J. Pelletier 1
1 LPSC-plasmas
LPSC - Laboratoire de Physique Subatomique et de Cosmologie
docType_s :
Conference papers
Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24


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Submitted on : Thursday, September 13, 2012 - 9:00:32 AM
Last modification on : Monday, October 13, 2014 - 3:00:43 PM

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A. Lacoste, G. Regnard, J. Pelletier. Coupling modes of microwave plasma sources with localized power absorption. Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24. <in2p3-00731527>

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