Coupling modes of microwave plasma sources with localized power absorption

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Submitted on : Thursday, September 13, 2012 - 9:00:32 AM
Last modification on : Thursday, September 13, 2012 - 9:00:32 AM

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A. Lacoste, G. Regnard, J. Pelletier. Coupling modes of microwave plasma sources with localized power absorption. Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24. <in2p3-00731527>

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