Coupling modes of microwave plasma sources with localized power absorption

Document type :
Conference papers
Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24, 2012


http://hal.in2p3.fr/in2p3-00731527
Contributor : Emmanuelle Vernay <>
Submitted on : Thursday, September 13, 2012 - 9:32:24 AM
Last modification on : Tuesday, January 20, 2015 - 11:19:39 AM

Identifiers

  • HAL Id : in2p3-00731527, version 1

Collections

Citation

A. Lacoste, G. Regnard, J. Pelletier. Coupling modes of microwave plasma sources with localized power absorption. Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.19-24, 2012. <in2p3-00731527>

Export

Share

Metrics

Consultation de la notice

21