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Poster communications
Design and performance head-to-head microwave plasma sources
P. Baële 1
Author
Stéphane Béchu 1
Author IdHAL : stephane-bechu ORCID : https://orcid.org/0000-0003-3333-8991
A. Bès 1
Author
Jean Pelletier 1
Author
A. Lacoste 1
Author
1
LPSC - Laboratoire de Physique Subatomique et de Cosmologie (53 avenue des Martyrs - 38026 Grenoble Cedex - France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- Institut Polytechnique de Grenoble - Grenoble Institute of Technology (France)
- IN2P3 - Institut National de Physique Nucléaire et de Physique des Particules du CNRS (France)
- UJF - Université Joseph Fourier - Grenoble 1 (BP 53 - 38041 Grenoble Cedex 9 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5821 (France)
Document type :
Poster communications
Complete list of metadata
http://hal.in2p3.fr/in2p3-00733289
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, September 18, 2012 - 12:43:32 PM
Last modification on : Thursday, March 11, 2021 - 10:36:02 AM
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, September 18, 2012 - 12:43:32 PM
Last modification on : Thursday, March 11, 2021 - 10:36:02 AM
Identifiers
- HAL Id : in2p3-00733289, version 1
Citation
P. Baële, Stéphane Béchu, A. Bès, Jean Pelletier, A. Lacoste. Design and performance head-to-head microwave plasma sources. Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.147-150, 2012. ⟨in2p3-00733289⟩
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