Design and performance head-to-head microwave plasma sources

P. Baële 1 S. Béchu 1 A. Bès 1 J. Pelletier 1 A. Lacoste 1
1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie
Document type :
Poster communications
Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.147-150, 2012
http://hal.in2p3.fr/in2p3-00733289
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, September 18, 2012 - 12:43:32 PM
Last modification on : Tuesday, January 20, 2015 - 11:28:55 AM

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  • HAL Id : in2p3-00733289, version 1

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P. Baële, S. Béchu, A. Bès, J. Pelletier, A. Lacoste. Design and performance head-to-head microwave plasma sources. Yu A. Lebedev. VIIIth International Workshop on Microwave Discharges: Fundamentals and Applications, Sep 2012, Zvenigorod, Russia. pp.147-150, 2012. <in2p3-00733289>

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