 |
Journal articles
Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition
Abstract : 1 Corresponding author.
Cited literature [38 references]
http://hal.in2p3.fr/in2p3-00734027
Contributor : Sylvie Flores Connect in order to contact the contributor
Submitted on : Thursday, January 10, 2019 - 9:42:42 AM
Last modification on : Wednesday, October 20, 2021 - 12:24:12 AM
Long-term archiving on: : Thursday, April 11, 2019 - 3:00:21 PM
Contributor : Sylvie Flores Connect in order to contact the contributor
Submitted on : Thursday, January 10, 2019 - 9:42:42 AM
Last modification on : Wednesday, October 20, 2021 - 12:24:12 AM
Long-term archiving on: : Thursday, April 11, 2019 - 3:00:21 PM
File
J.Dupuis - Optical and structu...
Files produced by the author(s)