J. Dupuis, E. Fourmond, D. Ballutaud, N. Bererd, M. Lemiti. Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition.
Thin Solid Films, Elsevier, 2010, 519, pp.1325-1333.
⟨10.1016/j.tsf.2010.09.036⟩.
⟨in2p3-00734027⟩