Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%

J.C. Dupuy; G. Prudon; C. Dubois; R. Koegler; S. Akhmadaliev; A. Perrat-Mabilon

doi:10.1002/sia.5108

Journal articles

Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%

J.C. Dupuy G. Prudon C. Dubois R. Koegler S. Akhmadaliev A. Perrat-Mabilon ¹

1 Accélérateur

IPNL - Institut de Physique Nucléaire de Lyon

Document type :

Journal articles

Domain :

Physics [physics] / Physics [physics] / Accelerator Physics [physics.acc-ph]

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Submitted on : Wednesday, June 19, 2013 - 10:24:37 AM
Last modification on : Friday, September 10, 2021 - 1:50:22 PM

Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%

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Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%

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