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Elementary microwave plasma sources with extended operating parameters: concept, design and performance. Examples of applications in the very low and low pressure range

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http://hal.in2p3.fr/in2p3-00849420
Contributor : Emmanuelle Vernay <>
Submitted on : Wednesday, July 31, 2013 - 8:14:55 AM
Last modification on : Monday, July 20, 2020 - 9:18:28 AM

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  • HAL Id : in2p3-00849420, version 1

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P. Baele, T.L. Phan, A. Todoran, C. Prahoveanu, A. Lacoste. Elementary microwave plasma sources with extended operating parameters: concept, design and performance. Examples of applications in the very low and low pressure range. 16th International Conference on Plasma Physics and Applications (CPPA2013), Jun 2013, Bucharest, Romania. ⟨in2p3-00849420⟩

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