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High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Abstract : Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic parametric devices, high quality factor resonators are required. We present millimetre-scale silicon resonators designed to exhibit a torsional vibration mode with a frequency in the 105-106 Hz range, for observation of 3-mode optoacoustic interactions in a compact table-top system. Our design incorporates an isolation stage and minimizes the acoustic loss from optical coating. We observe a quality factor of 7.5 × 105 for a mode frequency of 401.5 kHz, at room temperature and pressure of 10-3 Pa. We confirmed the mode shape by mapping the amplitude response across the resonator and comparing to finite element modelling. This study contributes to the development of 3-mode optoacoustic parametric amplifiers for use in novel high-sensitivity signal transducers and quantum measurement experiments.
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http://hal.in2p3.fr/in2p3-00859697
Contributor : Dominique Girod <>
Submitted on : Monday, September 9, 2013 - 12:08:15 PM
Last modification on : Monday, March 2, 2020 - 1:38:05 PM

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F.A. Torres, P. Meng, L. Ju, C. Zhao, D.G. Blair, et al.. High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers. Journal of Applied Physics, American Institute of Physics, 2013, 114, pp.14506. ⟨10.1063/1.4812731⟩. ⟨in2p3-00859697⟩

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