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Growth of magnesium hydride assisted by distributed microwave plasma sources: performance improvement through control of process parameters

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http://hal.in2p3.fr/in2p3-00943153
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, February 7, 2014 - 9:54:20 AM
Last modification on : Thursday, November 19, 2020 - 12:58:50 PM

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  • HAL Id : in2p3-00943153, version 1

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A. Lacoste, L. Laversenne. Growth of magnesium hydride assisted by distributed microwave plasma sources: performance improvement through control of process parameters. 8th International Conference on Reactive Plasmas - 31st Symposium on Plasma Processing (ICRP-8/SPP-31), Feb 2014, Fukuoka, Japan. ⟨in2p3-00943153⟩

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