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Poster communications

Microwave plasma with localized power absorption: from elementary sources to device andapplications

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Poster communications
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http://hal.in2p3.fr/in2p3-00943157
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, February 7, 2014 - 9:58:05 AM
Last modification on : Monday, July 20, 2020 - 9:18:26 AM

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  • HAL Id : in2p3-00943157, version 1

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A. Bès, Long Tan Phan, S. Béchu, J. Pelletier, A. Lacoste. Microwave plasma with localized power absorption: from elementary sources to device andapplications. 8th International Conference on Reactive Plasmas - 31st Symposium on Plasma Processing (ICRP-8/SPP-31), Feb 2014, Fukuoka, Japan. ⟨in2p3-00943157⟩

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