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Doping profiles and TCAD simulations of ATLAS planar pixel sensors for IBL upgrade

N. Dinu 1
1 Sce Electronique
LAL - Laboratoire de l'Accélérateur Linéaire
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http://hal.in2p3.fr/in2p3-00952662
Contributor : Sabine Starita <>
Submitted on : Thursday, February 27, 2014 - 11:54:00 AM
Last modification on : Wednesday, September 16, 2020 - 5:42:41 PM

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  • HAL Id : in2p3-00952662, version 1

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N. Dinu. Doping profiles and TCAD simulations of ATLAS planar pixel sensors for IBL upgrade. 9th Trento Workshop on Advanced Silicon Radiation detectors (3D and p-type technologies), Feb 2014, Genova, Italy. ⟨in2p3-00952662⟩

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