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Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD

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http://hal.in2p3.fr/in2p3-01009514
Contributor : Emmanuelle Vernay <>
Submitted on : Wednesday, June 18, 2014 - 9:46:24 AM
Last modification on : Monday, July 20, 2020 - 9:18:29 AM

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  • HAL Id : in2p3-01009514, version 1

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A. Todoran, M. Mantel, A. Bès, C. Vachey, A. Lacoste. Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD. 26th Symposium on Plasma Physics and Technology (SPPT), Jun 2014, Prague, Czech Republic. ⟨in2p3-01009514⟩

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