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Conference papers
Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD
A. Lacoste 1
Author
1
LPSC - Laboratoire de Physique Subatomique et de Cosmologie (53 avenue des Martyrs - 38026 Grenoble Cedex - France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- Institut Polytechnique de Grenoble - Grenoble Institute of Technology (France)
- IN2P3 - Institut National de Physique Nucléaire et de Physique des Particules du CNRS (France)
- UJF - Université Joseph Fourier - Grenoble 1 (BP 53 - 38041 Grenoble Cedex 9 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5821 (France)
2
UGITECH, Schmolz Bickenbach Grp Res Center (F-73403 Ugine - France)
Document type :
Conference papers
Complete list of metadata
http://hal.in2p3.fr/in2p3-01009514
Contributor : Emmanuelle Vernay Connect in order to contact the contributor
Submitted on : Wednesday, June 18, 2014 - 9:46:24 AM
Last modification on : Thursday, November 19, 2020 - 12:59:02 PM
Contributor : Emmanuelle Vernay Connect in order to contact the contributor
Submitted on : Wednesday, June 18, 2014 - 9:46:24 AM
Last modification on : Thursday, November 19, 2020 - 12:59:02 PM
Identifiers
- HAL Id : in2p3-01009514, version 1
Citation
A. Todoran, M. Mantel, A. Bès, C. Vachey, A. Lacoste. Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD. 26th Symposium on Plasma Physics and Technology (SPPT), Jun 2014, Prague, Czech Republic. ⟨in2p3-01009514⟩
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