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Thin films of thermoelectric compound Mg2Snx deposited by co-sputtering using ECR microwave multi-dipolar plasma

H. Le Quoc 1 A. Lacoste 1 E.K. Hlil A. Bès 1
1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie
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http://hal.in2p3.fr/in2p3-01017224
Contributor : Emmanuelle Vernay <>
Submitted on : Wednesday, July 2, 2014 - 9:48:28 AM
Last modification on : Thursday, November 19, 2020 - 12:59:02 PM

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  • HAL Id : in2p3-01017224, version 1

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H. Le Quoc, A. Lacoste, E.K. Hlil, A. Bès. Thin films of thermoelectric compound Mg2Snx deposited by co-sputtering using ECR microwave multi-dipolar plasma. 7th International Conference of Solid Compound of Transition Elements (SCTE 2010), Sep 2010, Annecy, France. ⟨in2p3-01017224⟩

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