Test results of the first 3D-IC prototype chip developed in the framework of HL-LHC/ATLAS hybrid pixel upgrade

Abstract : To face new challenges brought by the upgrades of the LargeHadron Collider at CERN and of the ATLAS pixels detector, for whichhigh spatial resolution, very good signal to noise ratio and highradiation hardness is needed, 3D integrated technologies areinvestigated. In the years to come, the Large Hadron Collider willbe upgraded to Higher Luminosity (HL-LHC). The ATLAS pixel detectorneeds to handle this new challenging environment. As a consequence,3D integrated technologies are pursued with the target of offeringhigher spatial resolution, very good signal to noise ratio andunprecedented radiation hardness. We present here the test resultsof the first 3D prototype chip developed in the GlobalFoundries 130nm technology processed by the Tezzaron Company, submitted withinthe 3D-IC consortium for which a qualification program wasdeveloped. Reliability and influence on the behavior of theintegrated devices due to the presence of the Bond Interface (BI)and of the Through Silicon Via (TSV) connections, both needed forthe 3D integration process, have also been addressed by the tests.
Type de document :
Communication dans un congrès
Topical Workshop on Electronics for Particle Physics (TWEPP13), Sep 2013, Perugia, Italy. IOP Publishing, 9, pp.C02031, 2014, 〈10.1088/1748-0221/9/02/C02031〉
Liste complète des métadonnées

http://hal.in2p3.fr/in2p3-01073779
Contributeur : Danielle Cristofol <>
Soumis le : vendredi 10 octobre 2014 - 13:57:04
Dernière modification le : jeudi 18 janvier 2018 - 01:55:57

Identifiants

Collections

Citation

P. Pangaud, D. Arutinov, M. Barbero, F. Bompard, P. Breugnon, et al.. Test results of the first 3D-IC prototype chip developed in the framework of HL-LHC/ATLAS hybrid pixel upgrade. Topical Workshop on Electronics for Particle Physics (TWEPP13), Sep 2013, Perugia, Italy. IOP Publishing, 9, pp.C02031, 2014, 〈10.1088/1748-0221/9/02/C02031〉. 〈in2p3-01073779〉

Partager

Métriques

Consultations de la notice

40