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Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD

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http://hal.in2p3.fr/in2p3-01083803
Contributor : Emmanuelle Vernay <>
Submitted on : Tuesday, November 18, 2014 - 9:35:06 AM
Last modification on : Thursday, November 19, 2020 - 12:59:04 PM

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A. Todoran, M. Mantel, A. Bès, C. Vachey, A. Lacoste. Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD. Plasma Sources Science and Technology, IOP Publishing, 2014, 23 (6), pp.065039. ⟨10.1088/0963-0252/23/6/065039⟩. ⟨in2p3-01083803⟩

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