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In-Plane Epitaxial Growth of Silicon Nanowires and Junction Formation on Si(100) Substrates

Lw Yu Mk Xu J Xu Zg Xue Z Fan G Picardi F Fortuna 1 Jz Wang Kj Chen Pri Cabarrocas 2
1 CSNSM INSTRU
CSNSM - Centre de Sciences Nucléaires et de Sciences de la Matière
2 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
Abstract : Growing self-assembled silicon nanowires (SiNWs) into precise locations represents a critical capability to scale up SiNW-based functionalities. We here report a novel epitaxy growth phenomenon and strategy to fabricate orderly arrays of self-aligned in-plane SiNWs on Si(100) substrates following exactly the underlying crystallographic orientations. We observe also a rich set of distinctive growth dynamics/modes that lead to remarkably different morphologies of epitaxially grown SiNWs/or grains under variant growth balance conditions. High-resolution transmission electron microscopy cross-section analysis confirms a coherent epitaxy (or partial epitaxy) interface between the in-plane SiNWs and the Si(100) substrate, while conductive atomic force microscopy characterization reveals that electrically rectifying p-n junctions are formed between the p-type doped in-plane SiNWs and the n-type c-Si(100) substrate. This in-plane epitaxy growth could provide an effective means to define nanoscale junction and doping profiles, providing a basis for exploring novel nanoelectronics.
Keywords : GUIDED GROWTH SI FILMS In-plane nanowire epitaxy growth junction formation self-assembly
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Journal articles
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http://hal.in2p3.fr/in2p3-01100533
Contributor : Emilie Bonnardel <>
Submitted on : Tuesday, January 6, 2015 - 3:43:19 PM
Last modification on : Wednesday, November 4, 2020 - 2:45:31 PM

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IN2P3 | CSNSM | CNRS | X | X-PICM | LPICM | X-DEP-PHYS

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Lw Yu, Mk Xu, J Xu, Zg Xue, Z Fan, et al.. In-Plane Epitaxial Growth of Silicon Nanowires and Junction Formation on Si(100) Substrates. Nano Letters, American Chemical Society, 2014, 14 (issue : 11), pp.6469-6474. ⟨10.1021/nl503001g⟩. ⟨in2p3-01100533⟩

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