Journal articles
Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array
Abstract : We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to <25 %. Measurements of a 132-pixel mKID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium mKIDs. We measured a noise equivalent power of NEP = 3.6e-15 Hz/Hz^(1/2). Finally, we describe possible routes to further improve the performance of these TiN mKID arrays.
http://hal.in2p3.fr/in2p3-01213949
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Wednesday, February 3, 2021 - 10:50:03 AM
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Wednesday, February 3, 2021 - 10:50:03 AM
Links full text
