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Journal articles
Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array
G. Coiffard
1, 2
K-F. Schuster
1
E. F. C. Driessen
1
S. Pignard
2
M. Calvo
3
A. Catalano
4
J. Goupy
5
A. Monfardini
5, 4
1
IRAM - Institut de RadioAstronomie Millimétrique (300 rue de la Piscine, Domaine Universitaire 38406 Saint Martin d'Hères - France)
- CNRS - Centre National de la Recherche Scientifique : UAR2074 / UPS2074 (France)
2
LMGP - Laboratoire des matériaux et du génie physique (Grenoble INP Minatec - 3 parvis Louis Néel - CS 50257- 38016 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5628 (France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- INPG - Institut National Polytechnique de Grenoble (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
3
Cryo - Cryogénie (Institut NEEL, 25 rue des Martyrs, BP 166,
38042 Grenoble cedex 9 - France)
- NEEL - Institut Néel (Institut NEEL, 25 rue des Martyrs, BP 166,
38042 Grenoble cedex 9 - France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UPR2940 (France)
- UGA [2016-2019] - Université Grenoble Alpes [2016-2019] (38058 Grenoble cedex - France)
4
LPSC - Laboratoire de Physique Subatomique et de Cosmologie (53 avenue des Martyrs - 38026 Grenoble Cedex - France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- IN2P3 - Institut National de Physique Nucléaire et de Physique des Particules du CNRS (France)
- CNRS - Centre National de la Recherche Scientifique : UMR5821 (France)
- UGA [2016-2019] - Université Grenoble Alpes [2016-2019] (38058 Grenoble cedex - France)
5
HELFA - Hélium : du fondamental aux applications (Institut NEEL, 25 rue des Martyrs, BP 166,
38042 Grenoble cedex 9 - France)
- NEEL - Institut Néel (Institut NEEL, 25 rue des Martyrs, BP 166,
38042 Grenoble cedex 9 - France)
- Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UPR2940 (France)
- UGA [2016-2019] - Université Grenoble Alpes [2016-2019] (38058 Grenoble cedex - France)
Abstract : We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to <25 %. Measurements of a 132-pixel mKID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium mKIDs. We measured a noise equivalent power of NEP = 3.6e-15 Hz/Hz^(1/2). Finally, we describe possible routes to further improve the performance of these TiN mKID arrays.
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Journal articles
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http://hal.in2p3.fr/in2p3-01213949
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Tuesday, May 11, 2021 - 11:37:28 AM
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Tuesday, May 11, 2021 - 11:37:28 AM
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- HAL Id : in2p3-01213949, version 1
- ARXIV : 1510.01876
- DOI : 10.1007/s10909-016-1489-9
Citation
G. Coiffard, K-F. Schuster, E. F. C. Driessen, S. Pignard, M. Calvo, et al.. Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array. Journal of Low Temperature Physics, Springer Verlag (Germany), 2016, 184 (3-4), pp.654-660. ⟨10.1007/s10909-016-1489-9⟩. ⟨in2p3-01213949⟩
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