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Journal articles
Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array
G. Coiffard
1, 2
K-F. Schuster
1
E. F. C. Driessen
1
S. Pignard
2
M. Calvo
3
A. Catalano
4
J. Goupy
5
A. Monfardini
5, 4
5
HELFA [2016-2019] - Hélium : du fondamental aux applications [2016-2019]
NEEL [2016-2019] - Institut Néel [2016-2019]
1
IRAM - Institut de RadioAstronomie Millimétrique (300 rue de la Piscine, Domaine Universitaire 38406 Saint Martin d'Hères - France)
- CNRS - Centre National de la Recherche Scientifique : UPS2074 (France)
2
LMGP [?-2019] - Laboratoire des matériaux et du génie physique [?-2019] (Grenoble INP Minatec - 3 parvis Louis Néel - CS 50257- 38016 Grenoble Cedex 1 - France)
- Grenoble INP [2007-2019] - Institut polytechnique de Grenoble - Grenoble Institute of Technology [2007-2019] (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5628 (France)
- INPG - Institut National Polytechnique de Grenoble (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
3
Cryo [?-2015] - Cryogénie [?-2015] (Institut NEEL CNRS/UGA UPR2940
25 rue des Martyrs BP 166
38042 Grenoble cedex 9 - France)
- NEEL [2007-2015] - Institut Néel [2007-2015] (Institut NEEL CNRS/UGA UPR2940
25 rue des Martyrs BP 166
38042 Grenoble cedex 9 - France)
- UJF - Université Joseph Fourier - Grenoble 1 (BP 53 - 38041 Grenoble Cedex 9 - France)
- Grenoble INP [2007-2019] - Institut polytechnique de Grenoble - Grenoble Institute of Technology [2007-2019] (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UPR2940 (France)
4
LPSC - Laboratoire de Physique Subatomique et de Cosmologie (53 avenue des Martyrs - 38026 Grenoble Cedex - France)
- Grenoble INP [2007-2019] - Institut polytechnique de Grenoble - Grenoble Institute of Technology [2007-2019] (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- Institut Polytechnique de Grenoble - Grenoble Institute of Technology (France)
- IN2P3 - Institut National de Physique Nucléaire et de Physique des Particules du CNRS (France)
- UJF - Université Joseph Fourier - Grenoble 1 (BP 53 - 38041 Grenoble Cedex 9 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR5821 (France)
5
HELFA [2016-2019] - Hélium : du fondamental aux applications [2016-2019] (Institut NEEL CNRS/UGA UPR2940
25 rue des Martyrs BP 166
38042 Grenoble cedex 9 - France)
- NEEL [2016-2019] - Institut Néel [2016-2019] (Institut NEEL CNRS/UGA UPR2940
25 rue des Martyrs BP 166
38042 Grenoble cedex 9 - France)
- Grenoble INP [2007-2019] - Institut polytechnique de Grenoble - Grenoble Institute of Technology [2007-2019] (46 avenue Félix Viallet 38031 Grenoble Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UPR2940 (France)
- UGA [2016-2019] - Université Grenoble Alpes [2016-2019] (CS 40700 - 38058 Grenoble cedex - France)
Abstract : We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical temperature over a 2 inch wafer was reduced to <25 %. Measurements of a 132-pixel mKID array from these films reveal a sensitivity of 16 kHz/pW in the 100 GHz band, comparable to the best aluminium mKIDs. We measured a noise equivalent power of NEP = 3.6e-15 Hz/Hz^(1/2). Finally, we describe possible routes to further improve the performance of these TiN mKID arrays.
Document type :
Journal articles
Complete list of metadatas
http://hal.in2p3.fr/in2p3-01213949
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Thursday, July 23, 2020 - 9:48:07 AM
Contributor : Emmanuelle Vernay <>
Submitted on : Friday, October 9, 2015 - 2:37:10 PM
Last modification on : Thursday, July 23, 2020 - 9:48:07 AM
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Identifiers
- HAL Id : in2p3-01213949, version 1
- ARXIV : 1510.01876
- DOI : 10.1007/s10909-016-1489-9
Citation
G. Coiffard, K-F. Schuster, E. F. C. Driessen, S. Pignard, M. Calvo, et al.. Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array. Journal of Low Temperature Physics, Springer Verlag (Germany), 2016, 184 (3-4), pp.654-660. ⟨10.1007/s10909-016-1489-9⟩. ⟨in2p3-01213949⟩
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