Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM)

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http://hal.in2p3.fr/in2p3-01245399
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Submitted on : Thursday, December 17, 2015 - 10:35:31 AM
Last modification on : Wednesday, February 20, 2019 - 12:40:05 PM

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T. Le Coz, M. Mantel, C. Vachey, A. Todoran, A. Bès, et al.. Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM). 4th Magneton, Ion Processing & Arc Technologies European Conference, 14th Internation Symposium on Reactive Sputter Deposition (MIATEC 2015), Dec 2015, Paris, France. ⟨in2p3-01245399⟩

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