Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM)

T. Le Coz; M. Mantel; C. Vachey; A. Todoran; A. Bès; A. Lacoste

Conference Papers Year :

Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM)

(1, 2) , (3, 2) , (2) , (1, 2) , (1) , (1)

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T. Le Coz

Function : Author

Laboratoire de Physique Subatomique et de Cosmologie

UGITECH

M. Mantel

Function : Author
PersonId : 757875
ORCID : 0000-0003-4258-5847

Science et Ingénierie des Matériaux et Procédés

UGITECH

C. Vachey

Function : Author

UGITECH

A. Todoran

Function : Author

Laboratoire de Physique Subatomique et de Cosmologie

UGITECH

A. Bès

Function : Author

Laboratoire de Physique Subatomique et de Cosmologie

A. Lacoste

Function : Author

Laboratoire de Physique Subatomique et de Cosmologie

Domains

Plasma Physics [physics.plasm-ph]

Emmanuelle Vernay : Connect in order to contact the contributor

https://hal.in2p3.fr/in2p3-01245399

Submitted on : Thursday, December 17, 2015-10:35:31 AM

Last modification on : Friday, June 2, 2023-3:36:26 PM

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in2p3-01245399 , version 1 (17-12-2015)

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HAL Id : in2p3-01245399 , version 1

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T. Le Coz, M. Mantel, C. Vachey, A. Todoran, A. Bès, et al.. Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM). 4th Magneton, Ion Processing & Arc Technologies European Conference, 14th Internation Symposium on Reactive Sputter Deposition (MIATEC 2015), Dec 2015, Paris, France. ⟨in2p3-01245399⟩

Origin of the heat load on a substrate coated in inverted cylindrical magnetron (ICM)

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