Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition

A. Martin Ortega 1 A. Bes 1 S. Bechu 1 A. Lacoste 1
1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie
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Poster communications
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http://hal.in2p3.fr/in2p3-01541647
Contributor : Emmanuelle Vernay <>
Submitted on : Monday, June 19, 2017 - 1:02:06 PM
Last modification on : Tuesday, May 22, 2018 - 9:48:11 PM

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  • HAL Id : in2p3-01541647, version 1

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A. Martin Ortega, A. Bes, S. Bechu, A. Lacoste. Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨http://kpfu.ru/eng/icpltp2017⟩. ⟨in2p3-01541647⟩

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