Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition

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Poster communications
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http://hal.in2p3.fr/in2p3-01541647
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Submitted on : Monday, June 19, 2017 - 1:02:06 PM
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A. Martin Ortega, A. Bes, S. Bechu, A. Lacoste. Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541647⟩

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