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Poster communications

Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition

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Poster communications
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http://hal.in2p3.fr/in2p3-01541647
Contributor : Emmanuelle Vernay <>
Submitted on : Monday, June 19, 2017 - 1:02:06 PM
Last modification on : Monday, December 14, 2020 - 10:18:10 AM

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  • HAL Id : in2p3-01541647, version 1

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A. Martin Ortega, A. Bes, Stéphane Béchu, A. Lacoste. Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541647⟩

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