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Poster communications

Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition

A. Martin Ortega 1 A. Bes 1 Stéphane Béchu 1 A. Lacoste 1
1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie
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Poster communications
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http://hal.in2p3.fr/in2p3-01541647
Contributor : Emmanuelle Vernay Connect in order to contact the contributor
Submitted on : Monday, June 19, 2017 - 1:02:06 PM
Last modification on : Wednesday, November 17, 2021 - 2:46:34 PM

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  • HAL Id : in2p3-01541647, version 1

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IN2P3 | LPSC-PLASMAS | LPSC | UGA | CNRS

Citation

A. Martin Ortega, A. Bes, Stéphane Béchu, A. Lacoste. Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541647⟩

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