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Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition

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http://hal.in2p3.fr/in2p3-01541651
Contributor : Emmanuelle Vernay <>
Submitted on : Monday, June 19, 2017 - 1:06:33 PM
Last modification on : Friday, April 3, 2020 - 11:44:02 AM

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  • HAL Id : in2p3-01541651, version 1

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A. Lacoste, P. Baele, A. Martin Ortega, A. Bes, S. Béchu. Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541651⟩

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