Skip to Main content Skip to Navigation
Conference papers

Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition

Document type :
Conference papers
Complete list of metadata

http://hal.in2p3.fr/in2p3-01541651
Contributor : Emmanuelle Vernay <>
Submitted on : Monday, June 19, 2017 - 1:06:33 PM
Last modification on : Tuesday, May 11, 2021 - 11:36:50 AM

Identifiers

  • HAL Id : in2p3-01541651, version 1

Collections

Citation

A. Lacoste, P. Baele, A. Martin Ortega, A. Bes, Stéphane Béchu. Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541651⟩

Share

Metrics

Record views

89