Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition

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Submitted on : Monday, June 19, 2017 - 1:06:33 PM
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A. Lacoste, P. Baele, A. Martin Ortega, A. Bes, S. Béchu. Elementary microwave plasma sources with extended operating parameters (from low to high- pressures) for large area deposition. International Conference “The Physics of Low Temperature Plasma” (PLTP-2017), Jun 2017, Kazan, Russia. ⟨in2p3-01541651⟩

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