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Ion-beam modifications of mechanical and dimensional properties of silicon carbide
Costantini J.M., Kerbiriou X., Sauzay M., Thomé L.
Journal of Physics D: Applied Physics 45 (2012) 465301 - http://hal.in2p3.fr/in2p3-00752985
Physique/Matière Condensée/Science des matériaux
Ion-beam modifications of mechanical and dimensional properties of silicon carbide
J. M. Costantini1, X. Kerbiriou1, M. Sauzay1, L. Thomé2
1 :  SRMA - Service des Recherches Métallurgiques Appliquées
CEA Saclay 91191 Gif sur Yvette
2 :  CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
CNRS : UMR8609 – IN2P3 – Université Paris XI - Paris Sud
batiments 104 et 108 - 91405 Orsay Campus
3C-SiC single crystal epitaxial layers, 6H-SiC single crystal plates and α-SiC Hexoloy sinters were irradiated with 4.0 MeV Xe or 4.0 MeV Au ions at room temperature. Mechanical and dimensional evolutions of silicon carbide are studied by means of nano-indentation and step-height measurements which are correlated with Rutherford backscattering spectrometry and channelling (RBS/C) data in single crystals. Irradiation with Xe ions induces a total lattice disorder related to amorphization for a fluence of 1 × 1015 cm−2 in both polytypes. When complete amorphization is reached, around the same values of Young's modulus (~350 GPa) and Berkovich hardness (~27 GPa) are found in both polytypes. The out-of-plane expansion increases with irradiation dose and the saturation value measured in the amorphous layer (normalized to the projected range of the ions) is close to 20-25%. Modifications of macroscopic properties are mainly governed by the disordered fraction of the material in a two-step damage process. A similar behaviour of material evolution is found for the cubic and hexagonal polytypes, either in single crystals or sintered polycrystalline samples. Calculations of Young's modulus and volume swelling are carried out using the analytical (Reuss and Voigt) models of homogenization.

Articles dans des revues avec comité de lecture
Journal of Physics D: Applied Physics
Publisher Institute of Physics: Hybrid Open Access
ISSN 0022-3727 (eISSN : 1361-6463)

61.80.Jh Ion radiation effects 81.40.Np Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure 62.20.M- Structural failure of materials 62.20.Qp Friction, tribology, and hardness 61.82.Fk Semiconductors 6