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Distributed microwave plasmas with extended operating conditions: new opportunities for plasma-based ion implantation and deposition
Pelletier J., Lacoste A., Regnard G.
10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009), Brésil (2009) [in2p3-00414168 - version 1]
Structural and magnetic properties of Ni3N synthesized by multidipolar microwave plasma-assisted reactive sputtering
Vempaire D., Miraglia S., Pelletier J., Fruchart D., Hlil E.-K. et al
Journal of Alloys and Compounds 480 (2009) 225-229 [in2p3-00394503 - version 1]
High deposition rates of uniform films in tetramethylsilane-based plasmas generated by elementary microwave sources in matrix configuration
Latrasse L., Lacoste A., Sánchez-López J.C., Bès A., Rayar M. et al
Surface and Coatings Technology 203 (2009) 2343-2349 [in2p3-00385208 - version 1]
Extraction of large-area low-energy electron beams from a multi-dipolar plasma
Lacoste A., Béchu S., Maulat O., Pelletier J., Arnal Y.
Plasma Sources Science and Technology 18 (2009) 015017 [in2p3-00354123 - version 1]
fulltext access Study of the plasma near the plasma electrode by probes and photodetachment in ECR-driven negative ion source
Bacal M., Svarnas P., Béchu S., Pelletier J.
Dans AIP Conference Proceedings NEGATIVE IONS, BEAMS AND SOURCES: Proceedings of the 1st International Symposium on Negative Ions, Beams and Sources - 1st International Conference on Negative Ions, Beams and Sources (NIBS 2008), France (2008) [in2p3-00336457 - version 1]
Production of H- ions by surface mechanisms in Cs-free multi-dipolar microwave plasma
Béchu S., Lemoine D., Bès A., Pelletier J., Bacal M.
Dans AIP Conference Proceedings NEGATIVE IONS, BEAMS AND SOURCES: Proceedings of the 1st International Symposium on Negative Ions, Beams and Sources - 1st International Conference on Negative Ions, Beams and Sources NIBS 2008, France (2008) [in2p3-00336454 - version 1]
Vibrationnally excited H2 formation on graphite surface
Béchu S.
ARCHES Workshop - Elementary mechanisms of hydrogen / carbon-surface interactions, France (2008) [in2p3-00338209 - version 1]
Étude d'un plasma micro-onde d'hydrogène en configuration matricielle pour application potentielle au dépôt de diamant sur grande surface
Rayar M., Le Quoc H., Lacoste A., Pelletier J., Bès A.
Cinétique des Plasmas, Recherche et Applications, 3ème édition (CiPRA3), France (2008) [in2p3-00395117 - version 1]
Des sources plasma micro-onde dipolaires aux plasmas matriciels
Tan Vin T., Béchu S., Bès A., Latrasse L., Lacoste A. et al
Dans Plasmas Froids. Systèmes et procédés (2008) 85-121 [in2p3-00390941 - version 1]
Bulk and thin films of magnetic shape memory Ni-Mn-Ga alloys deposited by multi-dipolar plasma-assisted sputtering
Girard G., Béchu S., Caillault N., Carbone L., Ortega L. et al
Journal of Alloys and Compounds 465 (2008) 35-40 [in2p3-00339190 - version 1]