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Revue de Physique Appliquee 15, 1 (1980) 21-23
Electron spin and cyclotron resonance of laser annealed silicon
A. GoltzenÉ, J.C. Muller1, C. Schwab, P. Siffert1

EPR and cyclotron resonance investigations have been performed on laser annealed Si wafers, leading to the identification of the [V + O i]- complex in virgin Si and to a donor signal quenching in P-implanted Si.
1 :  IReS - Institut de Recherches Subatomiques
Physique/Articles anciens

Physique/Physique Nucléaire Expérimentale
annealing – elemental semiconductors – laser beam effects – paramagnetic resonance – silicon – cyclotron resonance – EPR – laser annealed Si wafers – donor signal quenching – electron spin – defects – deep levels – Si:P – elemental semiconductor
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