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Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes
Tran Thi T. N., Fernandez B., Eon D., Gheeraert E., Haertwig J. et al
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 208, 9 (2011) 2057-2061 [hal-00740914 - version 1]