38 articles – 124 Notices  [english version]
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1 document
Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing
Franc J., Barnier V., Vocanson F., Gamet E., Lesage M. et al
Thin Solid Films 520, 19 (2012) 6050 [ujm-00681960 - version 1]