Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

B. Cimma; D. Forest; P. Ganau; B. Lagrange; J.-M. Mackowski; C. Michel; J.-L. Montorio; N. Morgado; R. Pignard; L. Pinard; A. Remillieux

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Applied Optics 45 (2006) 1436-1439

Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

B. Cimma¹, D. Forest¹, P. Ganau¹, B. Lagrange¹, J.-M. Mackowski¹, C. Michel¹, J.-L. Montorio¹, N. Morgado¹, R. Pignard¹, L. Pinard¹, A. Remillieux¹

VIRGO Collaboration(s)

(2006)

Large mirrors (∅350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.

1 :	LMA - Laboratoire des matériaux avancés

Thème(s)

Physique/Physique/Optique

Physique/Physique/Instrumentations et Détecteurs

Physique/Matière Condensée/Science des matériaux

Mot(s)-clé(s) : Instrumentation measurement and metrology : Interferometry – Materials : Optical materials – Optics at surfaces : Thin films


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Soumis le : Vendredi 24 Mars 2006, 11:02:29
Dernière modification le : Vendredi 24 Mars 2006, 11:05:00