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39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego : États-Unis (2012)
The multi beam sputtering: a new thin film deposition approach
P. Sortais1, J. Médard1
(2012-04-26)
1:  LPSC - Laboratoire de Physique Subatomique et de Cosmologie
Physics/Physics/Accelerator Physics