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Publications du LPSC |  |
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Publications du LPSC | |
| HAL: in2p3-00697281, version 1 |
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| 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego : États-Unis (2012) |
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| The multi beam sputtering: a new thin film deposition approach |
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| P. Sortais1J. Médard1 |
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| (2012-04-26) |
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| 1: | LPSC - Laboratoire de Physique Subatomique et de Cosmologie |
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| Subject(s) | : | Physics/Physics/Accelerator Physics |
| in2p3-00697281, version 1 | |
| http://hal.in2p3.fr/in2p3-00697281 | |
| oai:hal.in2p3.fr:in2p3-00697281 | |
| From: Emmanuelle Vernay | |
| Submitted on: Tuesday, 15 May 2012 09:49:38 | |
| Updated on: Tuesday, 15 May 2012 12:07:38 | |
