Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films - Archive ouverte HAL Access content directly
Conference Papers Year : 1998

Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films

, , , , , , (1)
1
T. Heitz
  • Function : Author
C. Godet
CV
J.E. Bouree
CV
B. Drevillon
  • Function : Author
V. Chu
  • Function : Author
J.P. Conde
  • Function : Author
C. Clerc
  • Function : Author
Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse

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Physics [physics] Physics [physics] Instrumentation and Detectors [physics.ins-det]

Jocelyne Lorgeril  : Connect in order to contact the contributor

https://hal.in2p3.fr/in2p3-00003198

Submitted on : Tuesday, November 23, 1999-3:44:46 PM

Last modification on : Wednesday, September 16, 2020-4:06:32 PM

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in2p3-00003198 , version 1 (23-11-1999)

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  • HAL Id : in2p3-00003198 , version 1

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T. Heitz, C. Godet, J.E. Bouree, B. Drevillon, V. Chu, et al.. Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films. Flat-Panel Display Materials - 1998 Symposium of the Materials Research Society, Apr 1998, San Francisco, United States. pp.203-208. ⟨in2p3-00003198⟩

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