Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films - Archive ouverte HAL Access content directly
Conference Papers Year : 1998

Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films

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1
T. Heitz
  • Function : Author
C. Godet
J.E. Bouree
B. Drevillon
  • Function : Author
V. Chu
  • Function : Author
J.P. Conde
  • Function : Author
Not file

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in2p3-00003198 , version 1 (23-11-1999)

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  • HAL Id : in2p3-00003198 , version 1

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T. Heitz, C. Godet, J.E. Bouree, B. Drevillon, V. Chu, et al.. Role of RF power and gas mixture in some optical and photoluminescence properties of dual-plasma a-C:H films. Flat-Panel Display Materials - 1998 Symposium of the Materials Research Society, Apr 1998, San Francisco, United States. pp.203-208. ⟨in2p3-00003198⟩

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