A high current ion implanter with hybrid scanning - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Journal Articles Nuclear Instruments and Methods in Physics Research Year : 1980
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in2p3-00003832 , version 1 (13-01-2000)

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  • HAL Id : in2p3-00003832 , version 1

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J. Camplan, J. Chaumont, R. Meunier, R. Graber, J.C. Rouge, et al.. A high current ion implanter with hybrid scanning. Nuclear Instruments and Methods in Physics Research, 1980, 171, pp.245-250. ⟨in2p3-00003832⟩
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