Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

M.C. Busch; A. Slaoui; P. Siffert; E. Dooryhee; M. Toulemonde

Journal articles

Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

M.C. Busch ¹ A. Slaoui ¹ P. Siffert ¹ E. Dooryhee M. Toulemonde

1 IReS - Institut de Recherches Subatomiques

Document type :

Journal articles

Domain :

Physics [physics] / Physics [physics] / Instrumentation and Detectors [physics.ins-det]

Complete list of metadata

http://hal.in2p3.fr/in2p3-00004931
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Submitted on : Friday, June 16, 2000 - 2:57:02 PM
Last modification on : Wednesday, February 17, 2021 - 11:50:24 AM

Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

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Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

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