Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

M.C. Busch; A. Slaoui; P. Siffert; E. Dooryhee; M. Toulemonde

Journal Articles Journal of Applied Physics Year : 1991

Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

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1

M.C. Busch

Function : Author

Institut de Recherches Subatomiques

A. Slaoui

Function : Author

Institut de Recherches Subatomiques

P. Siffert

Function : Author

Institut de Recherches Subatomiques

E. Dooryhee

Function : Author

M. Toulemonde

Function : Author
PersonId : 743931
IdHAL : marcel-toulemonde

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Instrumentation and Detectors [physics.ins-det]

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Submitted on : Friday, June 16, 2000-2:57:02 PM

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in2p3-00004931 , version 1 (16-06-2000)

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HAL Id : in2p3-00004931 , version 1

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M.C. Busch, A. Slaoui, P. Siffert, E. Dooryhee, M. Toulemonde. Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures. Journal of Applied Physics, 1991, 71, pp.2596-2601. ⟨in2p3-00004931⟩

Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

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