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Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures

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http://hal.in2p3.fr/in2p3-00004931
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Submitted on : Friday, June 16, 2000 - 2:57:02 PM
Last modification on : Wednesday, February 17, 2021 - 11:50:24 AM

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  • HAL Id : in2p3-00004931, version 1

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M.C. Busch, A. Slaoui, P. Siffert, E. Dooryhee, M. Toulemonde. Structural and electrical damage induced by high-energy heavy ions in SiO$_{2}$/Si structures. Journal of Applied Physics, American Institute of Physics, 1991, 71, pp.2596-2601. ⟨in2p3-00004931⟩

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