Analysis of vibrational properties of thin films using in-situ infrared ellipsometry: applications to polymer-like amorphous carbon films - Archive ouverte HAL Access content directly
Conference Papers Year : 1999

Analysis of vibrational properties of thin films using in-situ infrared ellipsometry: applications to polymer-like amorphous carbon films

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1
T. Heitz
  • Function : Author
B. Drevillon
  • Function : Author
C. Godet
J.E. Bouree
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Dates and versions

in2p3-00007066 , version 1 (28-11-2000)

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  • HAL Id : in2p3-00007066 , version 1

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T. Heitz, B. Drevillon, C. Godet, J.E. Bouree, C. Clerc. Analysis of vibrational properties of thin films using in-situ infrared ellipsometry: applications to polymer-like amorphous carbon films. Plasma Deposition and Treatment of Polymers. Symposium, Nov 1998, Boston, United States. pp.71-76. ⟨in2p3-00007066⟩
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