Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Journal Articles Applied Surface Science Year : 2002

Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation

H. Spillmann
  • Function : Author
M. Dobeli
  • Function : Author
P.R. Willmott
  • Function : Author
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in2p3-00012840 , version 1 (05-06-2003)

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  • HAL Id : in2p3-00012840 , version 1

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H. Spillmann, C. Clerc, M. Dobeli, P.R. Willmott. Gas-phase mechanism in the growth of ZrC$_y$N$_{1-y}$ thin films by pulsed reactive crossed-beam laser ablation. Applied Surface Science, 2002, 197-198, pp.304-311. ⟨in2p3-00012840⟩
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