Sio$_2$-ta$_2o_5$ sputtering yields : simulated and experimental results - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Journal Articles Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 1995
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in2p3-00012956 , version 1 (09-02-1999)

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  • HAL Id : in2p3-00012956 , version 1

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E. Vireton, P. Ganau, J.-M. Mackowski, Christine Michel, L. Pinard, et al.. Sio$_2$-ta$_2o_5$ sputtering yields : simulated and experimental results. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995, 95, pp.34-40. ⟨in2p3-00012956⟩
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