Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering - IN2P3 - Institut national de physique nucléaire et de physique des particules Access content directly
Conference Papers Applied Surface Science Year : 1991

Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering

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in2p3-00013246 , version 1 (31-05-1999)

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  • HAL Id : in2p3-00013246 , version 1

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A. Chevarier, N. Chevarier, M. El Bouanani, E. Gerlic, M. Stern, et al.. Profiling and nuclear reaction spectroscopy of carbon oxygen and argon contamination in sputter-deposited films using nuclear backscattering. International Conference On Solid Films And Surfaces 5, Aug 1990, Providence, United States. pp.215-221. ⟨in2p3-00013246⟩
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