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Conference Papers Year : 1998

Crystalline effect on the lateral spread of implanted ions

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in2p3-00013379 , version 1 (29-03-2000)

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  • HAL Id : in2p3-00013379 , version 1

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S.T. Nakagawa, Y. Hada, L. Thome. Crystalline effect on the lateral spread of implanted ions. 1998 International Conference on Ion Implantation Technology, Jun 1998, Kyoto, Japan. pp.767-770. ⟨in2p3-00013379⟩
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