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Journal Articles Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Year : 1993

Characterization of silicon during the fabrication of nuclear detectors by the planar process

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in2p3-00015759 , version 1 (25-05-2000)

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  • HAL Id : in2p3-00015759 , version 1

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J.C. Fontaine, S. Barthe, J.P. Ponpon, J.P. Schunck, P. Siffert. Characterization of silicon during the fabrication of nuclear detectors by the planar process. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1993, 326, pp.10-15. ⟨in2p3-00015759⟩
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