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Journal Articles Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Year : 1993

Gold and platinium accumulation on buried defects in silicon

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in2p3-00015775 , version 1 (25-05-2000)

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  • HAL Id : in2p3-00015775 , version 1

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P. Rohr, J.J. Grob, P. Siffert. Gold and platinium accumulation on buried defects in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993, 80/81, pp.640-643. ⟨in2p3-00015775⟩
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