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Gold gettering induced by rapid thermal doping using spin-on sources

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http://hal.in2p3.fr/in2p3-00015909
Contributor : Yvette Heyd Connect in order to contact the contributor
Submitted on : Wednesday, May 31, 2000 - 2:00:35 PM
Last modification on : Thursday, April 23, 2020 - 2:26:19 PM

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  • HAL Id : in2p3-00015909, version 1

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B. Hartiti, J.C. Muller, P. Siffert. Gold gettering induced by rapid thermal doping using spin-on sources. Applied Physics Letters, American Institute of Physics, 1991, 59, pp.425-427. ⟨in2p3-00015909⟩

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