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Journal Articles IEEE Transactions on Electron Devices Year : 1992

Defect generation and gettering during rapid thermal processing

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in2p3-00016007 , version 1 (06-06-2000)

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  • HAL Id : in2p3-00016007 , version 1

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B. Hartiti, J.C. Muller, P. Siffert. Defect generation and gettering during rapid thermal processing. IEEE Transactions on Electron Devices, 1992, 39, pp.96-104. ⟨in2p3-00016007⟩
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