Synthesis of SiO$_2$ thin films by reactive excimer laser ablation

E. Fogarassy; A. Slaoui; C. Fuchs; J.P. Stoquert

Journal Articles Applied Surface Science Year : 1992

Synthesis of SiO$_2$ thin films by reactive excimer laser ablation

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1

E. Fogarassy

Function : Author

Institut de Recherches Subatomiques

A. Slaoui

Function : Author

Institut de Recherches Subatomiques

C. Fuchs

Function : Author

Institut de Recherches Subatomiques

J.P. Stoquert

Function : Author

Institut de Recherches Subatomiques

Domains

Physics [physics] Physics [physics] Chemical Physics [physics.chem-ph]

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https://hal.in2p3.fr/in2p3-00016023

Submitted on : Tuesday, June 6, 2000-3:40:29 PM

Last modification on : Thursday, April 23, 2020-2:26:19 PM

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in2p3-00016023 , version 1 (06-06-2000)

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HAL Id : in2p3-00016023 , version 1

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E. Fogarassy, A. Slaoui, C. Fuchs, J.P. Stoquert. Synthesis of SiO$_2$ thin films by reactive excimer laser ablation. Applied Surface Science, 1992, 54, pp.180-186. ⟨in2p3-00016023⟩

Synthesis of SiO$_2$ thin films by reactive excimer laser ablation

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