On the role of interfacial defect sites during solid phase epitaxial regrowth of implantation amorphized siliconpi

W.O. Adekoya; M. Hage-Ali; J.C. Muller; P. Siffert

Journal Articles Materials Research Society Symposia Proceedings Year : 1988

On the role of interfacial defect sites during solid phase epitaxial regrowth of implantation amorphized siliconpi

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1

W.O. Adekoya

Function : Author

M. Hage-Ali

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Institut de Recherches Subatomiques

J.C. Muller

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P. Siffert

Function : Author

Institut de Recherches Subatomiques

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in2p3-00017460 , version 1 (26-09-2000)

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W.O. Adekoya, M. Hage-Ali, J.C. Muller, P. Siffert. On the role of interfacial defect sites during solid phase epitaxial regrowth of implantation amorphized siliconpi. Materials Research Society Symposia Proceedings, 1988, 100, pp.447. ⟨in2p3-00017460⟩

On the role of interfacial defect sites during solid phase epitaxial regrowth of implantation amorphized siliconpi

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