Infrared characterization of UV laser-induced silicon oxide films

A. Slaoui; E. Fogarassy; C.W. White; P. Siffert

Journal Articles Applied Physics Letters Year : 1988

Infrared characterization of UV laser-induced silicon oxide films

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1

A. Slaoui

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Institut de Recherches Subatomiques

E. Fogarassy

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Institut de Recherches Subatomiques

C.W. White

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P. Siffert

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Institut de Recherches Subatomiques

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Submitted on : Wednesday, September 27, 2000-9:43:15 AM

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in2p3-00017504 , version 1 (27-09-2000)

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A. Slaoui, E. Fogarassy, C.W. White, P. Siffert. Infrared characterization of UV laser-induced silicon oxide films. Applied Physics Letters, 1988, 53, pp.1832. ⟨in2p3-00017504⟩

Infrared characterization of UV laser-induced silicon oxide films

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