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Journal Articles Applied Physics Letters Year : 1987

Rapid thermal oxidation of silicon monoxide

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in2p3-00017596 , version 1 (28-09-2000)

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  • HAL Id : in2p3-00017596 , version 1

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E. Fogarassy, A. Slaoui, C. Fuchs, J.L. Regolini. Rapid thermal oxidation of silicon monoxide. Applied Physics Letters, 1987, 51, pp.337. ⟨in2p3-00017596⟩
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