Rapid thermal oxidation of silicon monoxide

E. Fogarassy; A. Slaoui; C. Fuchs; J.L. Regolini

Journal Articles Applied Physics Letters Year : 1987

Rapid thermal oxidation of silicon monoxide

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1

E. Fogarassy

Function : Author

Institut de Recherches Subatomiques

A. Slaoui

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Institut de Recherches Subatomiques

C. Fuchs

Function : Author

Institut de Recherches Subatomiques

J.L. Regolini

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Submitted on : Thursday, September 28, 2000-9:41:24 AM

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in2p3-00017596 , version 1 (28-09-2000)

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E. Fogarassy, A. Slaoui, C. Fuchs, J.L. Regolini. Rapid thermal oxidation of silicon monoxide. Applied Physics Letters, 1987, 51, pp.337. ⟨in2p3-00017596⟩

Rapid thermal oxidation of silicon monoxide

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